Multifunctional Probe Array and Local Vapor Inking Chip for Scanning Probe Nanolithography

Abstract

We present the design and application of a multifunctional scanning probe array for scanning probe lithography (SPL) applications, along with a new method for chemically inking the probes for nanoscale lithography. Each multi-functional scanning probe chip consists of an array of active probes. The dimensions and materials of the probes within the array are different, giving rise to different functions such as dip pen nanolithography, scanning probe contact printing, and AFM-mode imaging. The microfabricated multi-functional probe simplifies registration of SPL patterns. The novel local inking chip is based on local thermal evaporative inking transfer. The new inking transfer method results in low loss, rapid, and parallel inking action. The scanning probes are accommodated at the opening of each ink reservoir. A resistive heater located at the back of the chip is used to provide local heating to initiate vaporization of inks to uniformly coat individual probe within several minutes. Moreover, this inking chip also has multiple-probe inking capabilities.