Abstract
Refractive, diffractive and reflective micro-optical elements for laser beam shaping and homogenizing have been manufactured and tested. The presented multifunctional optical elements are used for shaping arbitrary laser beam profiles into a variety of geometries like, a homogeneous spot array or line pattern, a laser light sheet or flat-top intensity profiles. The resulting profiles are strongly influenced by the beam properties of the laser and by diffraction and interference effects at the micro-optical elements. We present general design rules for beam shaping and homogenizing. We demonstrate the application of such multifunctional micro-optical elements for a variety of applications from micro-laser machining to laser diagnostic systems.
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