Abstract
Using partial electrodes and a multifrequency electrical source, we present a large-bandwidth, large-amplitude clamped–clamped microbeam resonator excited near the higher order modes of vibration. We analytically and experimentally investigate the nonlinear dynamics of the microbeam under a two-source harmonic excitation. The first-frequency source is swept around the first three modes of vibration, whereas the second source frequency remains fixed. New additive and subtractive resonances are demonstrated. We illustrated that by properly tuning the frequency and amplitude of the excitation force, the frequency bandwidth of the resonator is controlled. The microbeam is fabricated using polyimide as a structural layer coated with nickel from the top and chromium and gold layers from the bottom. Using the Galerkin method, a reduced order model is derived to simulate the static and dynamic response of the device. A good agreement between the theoretical and experimental data are reported.
Highlights
Microelectromechanical systems (MEMS) resonators are the primary building blocks of several MEMS sensors and actuators that are used in a variety of applications, such as toxic gas sensors[1], mass and biological sensors[2,3,4,5], temperature sensors[6], force and acceleration sensors[7], and earthquake actuated switches[8]
Motivated by the interesting dynamics and the wide range of applications of a large bandwidth resonator excited near the higher order modes of vibration, the objective of this article is to excite higher order modes of vibrations combined with multifrequency excitation to broaden the frequency bandwidth around the excited modes
We investigate the governing equation for a clamped–clamped microbeam depicted in Figure 2, which is electrostatically actuated by two AC harmonic loads VAC1 and VAC2 of frequencies Ω1 and Ω2, respectively, and superimposed onto a DC load VDC
Summary
Microelectromechanical systems (MEMS) resonators are the primary building blocks of several MEMS sensors and actuators that are used in a variety of applications, such as toxic gas sensors[1], mass and biological sensors[2,3,4,5], temperature sensors[6], force and acceleration sensors[7], and earthquake actuated switches[8]. MEMS resonators can be based on thin-film surface micromachining, yielding compliant resonating structures, or bulk micromachining, for example, in the case of bulk resonators. These are primarily based on the wave propagation within the bulk structure. This article addresses the first category, that is, primarily clamped–clamped microbeam resonators. MEMS resonators are excited using different types of forces, such as piezoelectric[9], electromagnetic[10], thermal[11], and electrostatic[8,12]. The electrostatic excitation of resonators is the most commonly used method because of its simplicity and availability[12]
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