Abstract

It has always been the goal of atomic force microscopy to improve the spatial resolution, the data acquisition speed and the detection of material properties continuously. At present, the multi-frequency atomic force microscopy, which is a new technology, in recent years is the most possible mean to achieve the goal. Multi-frequency atomic force microscopy, which includes various methods to characterize the samples’ nanoscale properties, drives and/or detects micro-cantilever vibration by using multiple frequency. It can extract the nonlinear signal between tip and sample with a high composition detection sensitivity as well as temporal and spatial imaging resolution. In this paper, we reviews the basic principle of different implementation methods included in the multi-frequency atomic force microscopy, and illustrates them by some cutting-edge applications in high resolution imaging, nanometre mechanics, materials, biological application, etc. In addition, we proposed a special micro-cantilever model of quartz tuning fork that can be used in the multi-frequency atomic force microscopy. Finally, the article looks forward to its future development and applied research.

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