Abstract
An improved performance of a multidomain PZT actuator compared to a single domain actuator is demonstrated. The multidomain actuator is fabricated out of a 650‐μm‐thick single domain plate. The internal electric field is inverted by applying 1 kV/mm external electric field to 1/3 of the plate area. The remaining 2/3 of the area is left with the original internal electric field. The actuator is excited by applying 1 kV ac voltage to the electrodes deposited on the top and bottom surfaces of the plate. The amplitude of acoustical displacement at the tip of the actuator is calculated with the aid of a finite element model developed for the piezoelectric plate. In an experiment, the amplitude of tip vibration is measured under the microscope. The experimental resonance frequencies are consistent with the calculations. At the second order resonance, the calculations predict 25% higher amplitude of vibrations for the multidomain actuator than for the single domain actuator. The results for several actuators with different configurations of ferroelectric domains are compared to the single domain actuator.
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