Abstract
The design and optimization of integrated microsystem require comprehensive consideration of the coupling effects of fabrication process, physical structure parameters, air environments, and interface electronics before the costly and time-consuming microfabrication. In this paper a multidisciplinary design framework including fabrication factor, structural property, readout circuit and environmental quality factor is proposed to optimize the whole performance of microgyroscope which is one typical integrated microsystem. Genetic algorithm (CA) is applied to maximize sensitivity under the given multidisciplinary optimization model. The optimal results are verified with FEM modal analysis and compared with the conventional gradient-based optimization method, which demonstrates it is effective for microgyroscope?s global design optimization.
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