Abstract
We have fabricated 9-channel silicon wavelength-division-multiplexing (WDM) ring filters using 193nm deep-ultraviolet (DUV) lithography and investigated the spectral properties of the ring filters by comparing the transmission spectra with and without an upper cladding. The average channel-spacing of the 9-channel WDM ring filter with a polymeric upper cladding is measured about 1.86nm with the standard deviation of the channel-spacing about 0.34nm. The channel crosstalk is about −30dB, and the minimal drop loss is about 2dB.
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