Abstract

Multi-channel SAW chemical sensor is used as an analytical system for organic gas detection. SAW sensors show a high frequency property, and can become multi-channel devices on a substrate. The features improve sensor sensitivity and enable integration of the sensor. In this paper, we propose a new chemical sensor system using multi-channel SAW devices. A four channel SAW delay line was designed and fabricated on one piezoelectric substrate. Each channel was coated by a different selective organic film and the output of each channel was used to make a response pattern. The response to odorant solvents showed different analyte specific patterns.

Full Text
Published version (Free)

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call