Abstract
A fiber-optic multicavity Fabry-Pe/spl acute/rot interferometric thin-film sensor with built-in temperature compensation has been constructed and demonstrated. Temperature information can be extracted from the multicavity structure to correct the temperature dependence of the optical thickness measurement of self-assembled thin-films. Experimental results demonstrate that the sensor is able to automatically compensate the temperature-induced optical-thickness error over the range from 0/spl deg/C to 100/spl deg/C.
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