Abstract
Two standardization techniques were implemented for transferring three multi-way calibration models for determining of the suppressor concentration in industrial copper electrometallization baths used in semiconductor manufacturing. Parallel Factor analysis (PARAFAC) for multi-way array decomposition coupled with Inverse Least Squares (ILS) (PARAFAC/ILS) regression, Direct Trilinear Decomposition (DTLD) coupled with ILS (DTLD/ILS), and Multi-linear Partial Least Squares (N-PLS) regressions were employed to develop and test calibration models based on trilinear Alternating Current (AC) voltammetric data. The calibration transfer was performed by Direct Standardization (DS) and Reverse Standardization (RS) on the voltammetric data. The pairwise performance of standardization techniques and decomposition/regression techniques was studied comparatively in order to assess reliability and robustness of analytical model transfer.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
