Abstract

Multi-wavelength laser arrays (MLAs) with a high wavelength-spacing precision are designed and fabricated. The MLAs are realized by the reconstruction-equivalent chirp (REC) technique, and anti-reflection structures are used to decrease the wavelength deviation. Six multi-wavelength laser arrays are fabricated and tested. Statistical results show that 81.1% of all 95 lasers have wavelength deviations within ±0.1 nm, and all of them are within ±0.2 nm. The mean wavelength spacing is 1.605 nm, and the standard deviation is 0.132 nm.

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