Abstract
Aspheric optics has been widely used in the space telescope system. The large amount of material removal and mid-frequency errors district the high-precision and high-efficiency fabrication of large-scale aspheric optics. On the basis of parsing the figuring ability of tool influence functions (TIFs) and principles of smoothing polishing technology, the multi-TIFs process is proposed in this paper. Then the selection principle and replacement time of TIFs have been discussed. Furthermore, the multi-TIFs process is optimized with frequency filtering method. This filtering method with multi-TIFs can obtain better surface accuracy in a faster way compared to the traditional method. Finally, a Φ540mm SiC off-axis aspheric mirror is polished to verify the proposed method.
Published Version
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