Abstract
The control strategy of multi-stroke repetitive driving is often required in the micro-nano-system. However, the current research only focuses on the modeling algorithm of a single stroke; thus, it is difficult to realize the hysteresis compensation at any stroke of the piezoelectric actuator. This paper proposes a multi-stroke compensation algorithm combined with the inverse model: through the analysis of the hysteresis model, the rising trajectory with better linearity is defined as the target line to find a mathematical expression with fewer parameters to describe the falling trajectory, then to find the relationship between maximum stroke voltage and the above parameters to establish a mathematical model that can describe any stroke, and finally, to verify that the above model applies to any unknown stroke, thereby realizing multi-stroke compensation. The experimental results show that the hysteresis corrected rate after the above algorithm compensation is mostly over 85%, of which the maximum hysteresis corrected rate is 93.81% and the hysteresis error is less than 2.5%. Experiments prove the effectiveness of the above multi-stroke compensation algorithm based on the inverse model and extend the research on piezoelectric hysteresis characteristics to multi-stroke compensation.
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