Multi-source AdaBoost with cross-weight method for virtual metrology in semiconductor manufacturing

Abstract

In the context of Industry 4.0, many production scenarios utilise sensors to monitor manufacturing processes, resulting in massive data that can be leveraged to build machine-learning models to improve production efficiency and quality. In semiconductor manufacturing, where many sensors are employed to monitor the production process, the resulting multi-sensor data poses challenges for constructing a virtual metrology (VM) model to assess wafer quality. Furthermore, building separate prediction models for each sensor can result in a loss of redundancy present in the multi-sensor data. Therefore, this paper proposes a multi-source AdaBoost with a cross-weight sampling method for predicting the critical dimension required in VM. Compared with the existing AdaBoost algorithm in regression, the proposed method adapts well to multi-source data by incorporating a cross-weight sampling distribution. Thus, when updating the sampling weight distribution, the impact of both individual and multi-source data is considered to re-sample high-quality observations. Based on the numerical results from the synthetic datasets and case study in semiconductor manufacturing, the proposed method outperforms benchmark methods. Additionally, owing to the redundancy of multi-sensor data, the proposed method demonstrates robust performance regardless of the noise level in the semiconductor VM data.