Abstract
The highly convergent x-ray beam focused by multilayer Laue lenses with large numerical apertures is used as a three-dimensional (3D) probe to image layered structures with an axial separation larger than the depth of focus. Instead of collecting weakly scattered high-spatial-frequency signals, the depth-resolving power is provided purely by the intense central cone diverged from the focused beam. Using the multi-slice ptychography method combined with the on-the-fly scan scheme, two layers of nanoparticles separated by 10 μm are successfully reconstructed with 8.1 nm lateral resolution and with a dwell time as low as 0.05 s per scan point. This approach obtains high-resolution images with extended depth of field, which paves the way for multi-slice ptychography as a high throughput technique for high-resolution 3D imaging of thick samples.
Highlights
The continuous advancements in x-ray sources, optics, detectors, and algorithms have significantly improved the achievable spatial resolution of x-ray microscopy
We demonstrate that two layers of nanoparticles separated by 10 μm along the axial direction are successfully reconstructed with a dwell time as low as 0.05 s using the on-the-fly scan mode
The experiment was performed at the Hard X-ray Nanoprobe (HXN) beamline, National Synchrotron Light Source II (NSLS-II)
Summary
The continuous advancements in x-ray sources, optics, detectors, and algorithms have significantly improved the achievable spatial resolution of x-ray microscopy. Integrating scanning probe microscopy with ptychography gains accumulating popularity for its multi-modality imaging capability with high spatial resolution [20,21,22]. The throughput of this approach was further enhanced by operating in the on-the-fly scan mode [23,24,25,26]
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