Abstract
The air gap shape compensation provided by distributed piezoelectric actuators is a promising method for tuning dynamic performances of aerostatic bearings. Although dynamic modeling is critical for compensation, it has not yet been clarified, owing to the strong interaction of air flow dynamics, structural flexibility, and piezoelectricity. Therefore, a multi-physics partitioned coupling (MPPC) model is proposed, and a partitioned algorithm with dynamic relaxation is adopted to solve it with low computational cost. Numerical results reveal that the stiffness and damping exhibit frequency-dependent behavior and can be enhanced remarkably by air gap shape compensation without additional air consumption. Finally, the proposed approach is verified experimentally.
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