Multi-Fields Simulation Model for Micro-Machined Capacitive Accelerometer

Abstract

To cope with the multi-physics fields simulation in MEMS device, based on PSPICE software, a multi-fields simulation model of capacitive micro-accelerometer is proposed, in which the mechanics, thermal and electric fields are included. Through the comparison of maximum step and pulse acceleration response under large displacement condition, which are obtained by simulation model and classic formula respectively, it is indicated that the difference between them is less than 3%. Furthermore, the comparison has been done with sensitivity test results in open loop mode. The comparison results show that the difference is less than 5% for large displacement situation and 3% for little displacement situation. Hence, the model could basically accomplish multi-physics fields simulation in MEMS device and be helpful in further research.