Multi-Field Coupled Dynamics for a Micro Beam

Abstract

This paper proposes a multi-field coupled dynamics equation for a micro beam. The natural frequencies and the amplitude–frequency relationship of the micro beam in the coupled fields are investigated. Changes in the natural frequencies of the micro beam along with time, bias voltage, and dynamic viscosity of gas are discussed. The effects of the system parameters on the amplitude–frequency relationship are investigated. A number of useful results are obtained. These results are useful in the sensitivity design of resonant micro gas sensors excited by the electrostatic force.