Abstract
We have developed the 10-way micro switching valve chip for micro dispenser system. This chip succeeded to switch ten outlets from one inlet without dead volume under high leakage pressure (> 700kPa). The valve was operated manually to confirm the switching principle with the rotary mechanism. As the next step, the micro solenoid drive switching valve chip was developed for simple and quick operation. Positioning and detection of present location at the outlet were achieved with the latch mechanism without necessity of positioning. To build the solenoid into the chip, the valve design parameters (the height of the silicon rubber ring and the compression force to the rotor) affecting the valve performance (the leakage pressure and the rotation force of the rotor) were optimized.
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