Abstract
The performance of two-dimensional pressure sensor arrays, consisting of 13 × 13 deformable steel diaphragms, is investigated. The pressureinduced out-of-plane component of the displacement field of all 169 sensors is measured in parallel using phase-stepping speckle interferometry. Subsequent least-squares fitting of the theoretical field provides a quantitative measure of the average pressure acting on each sensor. With monotonically-increasing load and suitable calibration, each pressure value can be measured to an accuracy of better than 1% of the full scale deflection. The current pressure range of 0–2.74 kPa can be extended by increasing the number of interferograms recorded.
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