Abstract
Recently, applications of TOF-SIMS have expanded into a wide variety of organic materials, because the sensitivity of high mass molecular ions was improved dramatically. However, it was very difficult to determine the chemical formula from the measured mass above m/z 200. The ambiguous peak identification was a significant problem in TOF-SIMS. In order to determine the chemical formula as well as detailed chemical structure, we developed the TOF-SIMS instrument equipped with MS/MS, and applied it to the various organic materials. In this article, we will introduce this unique instrument, and demonstrate the results of the spectra analyses by using MS/MS.
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