Abstract
New type of cross shaped ultrasonic rotary motor was designed and fabricated using a thin brass plate. Cross shaped stator was comprised by attaching ceramic plates on both sides of thin brass plate. When two harmonic voltages which have 90o phase difference were applied to ceramics, the symmetric and anti-symmetric displacements were generated at inside tips to make the elliptical motion. The finite element analysis (ATILA) was used for simulating the motional pattern of contact tips of the stator. Elliptical motions of the contact tips of the stator were consistently obtained at off resonance frequencies. From a prototype motor, speed of 500 rpm was obtained at 16 (Vrms).
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