Abstract
The paper focuses on motion control of a planar MEMS manipulator with three kinematic Degrees-Of-Freedom. The manipulator measures approximately 1.6 mm across and the size of its work envelope is approximately 20 μm across. It is suspended 2 μm above the substrate. The device is powered by three sets of thermal motors. The kinematic mobility of the mechanism is provided by more than 75 flexures connecting its rigid components. The objective of the study is to control the motion of the manipulator using commercially available general purpose laboratory software and hardware using only visual feedback. The application of a rigid-link kinematic model of the compliant manipulator structure proved to be practical. The general purpose imaging software was the slowest component of the feedback resulting in about 1s intervals between the control steps. The measured path tracing errors of 0.3 μm were close to the imagine apparatus resolution of 0.3μm / pixel.
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