Abstract
The present study provides a multi-scale investigation of the crystalline quality and the structural defects present in heteroepitaxial diamond films grown on iridium/SrTiO3 (001) substrates by microwave plasma assisted chemical vapor deposition. X-ray diffraction, Raman spectroscopy and low temperature cathodoluminescence are combined to accurately characterize the mosaicity, the density of dislocations and the residual strain within the films. X-ray diffraction and Raman results confirm a structural quality at the state-of-the-art according to the epitaxial relationship 〈100〉diamond(001)//〈100〉iridium(001)//〈100〉SrTiO3 (001). In addition, Raman and cathodoluminescence observations on cross-sections reveal the presence of local strain.
Highlights
Promising advances have been recently reported for the growth of diamond single crystals on large areas [1]
The objective of the present work is to provide a better understanding of the specific defects like dislocations and strain in heteroepitaxial diamond films grown on iridium/SrTiO3 (001)
The diamond film is still standing on the 5 × 5 mm2 Ir/SrTiO3 (001) substrate, which indicates that the residual strain of diamond film is low enough to avoid its spontaneous
Summary
Promising advances have been recently reported for the growth of diamond single crystals on large areas [1]. Iridium is up to now the best candidate to heteroepitaxially grow high quality diamond by the Chemical Vapor Deposition (CVD) technique. This behavior is related to a specific reactivity of iridium surface towards active species during Bias Enhanced Nucleation (BEN) [4] compared to other substrates like silicon [5] or silicon carbide [6,7]. Iridium epitaxial layers are currently deposited onto single crystal MgO, SrTiO3 or up-scalable substrates like YSZ (Yttria-stabilized zirconia)-buffered on silicon (001) [9]
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
