MOS Capacitance—Voltage Characteristics: IV. Trapping Capacitance from 3-Charge-State Impurities

Abstract

Metal—Oxide—Semiconductor Capacitance—Voltage (MOSCV) characteristics containing giant carrier trapping capacitances from 3-charge-state or 2-energy-level impurities are presented for not-doped, n-doped, p-doped and compensated silicon containing the double-donor sulfur and iron, the double-acceptor zinc, and the amphoteric or one-donor and one-acceptor gold and silver impurities. These impurities provide giant trapping capacitances at trapping energies from 200 to 800 meV (50 to 200 THz and 6 to 1.5 μm), which suggest potential sub-millimeter, far-infrared and spin electronics applications.