Abstract
The alkoxidic route and the spinning deposition were used to prepare monolayer sol–gel indium tin oxide (ITO) films. The morphology and crystalline structure were investigated by cross-section transmission electron microscopy (XTEM) and atomic force microscopy (AFM). The ITO sol–gel mono-layer contains three regions of different porosities. The basic crystalline structure is that of the In 2O 3 lattice. The optical properties have been studied by optical transmission and spectroscopic ellipsometry.
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