Morphology of second‐phase particles and pores in InP substrates and their elimination by a rapid in situ P injection before crystal growth

Abstract

In this paper, indium (In)-rich second-phase particles are observed in InP crystals, which is induced by the loss of phosphorus (P) during polycrystalline melting. Their characterizations reveal that the size of these In-rich particles is 200 nm–20 µm. The dislocation structure surrounding the second-phase particle and its formation is explained by the model of prismatic dislocation loop. The indium-rich second-phase particles could be eliminated under P-rich condition by a rapid in situ P injection before crystal growth. Excessive P injection will lead to the formation of P pores with internal P deposits. The optimal injection value is given to eliminate the defects.