Abstract
Translucent polycrystalline diamond film made by a DC plasma CVD method was investigated with cathodoluminescence spectroscopy and topography. Shift and/or splitting were found in peaks of several luminescence bands, 575, 532, 480, 460, 389, 270 (5RL) and 235 nm (FE), suggesting considerable magnitude of residual stress is present in the film. The behavior of the splitting was different for the different peak, indicating that the symmetries of the associated defects are different. The film after heat treatment at 6 GPa and 1800 °C was found to exhibit new luminescence bands approximately 300 and 500 nm. Splitting of the 575 nm peak was recognized to decrease with the heat treatment, suggesting that the residual stress was reduced.
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