Abstract
Tungsten oxide thin film has been found great potential use in various applications such as smart window, gas sensor and photoelectrochemical cell due to their unique electrochromic, gas-chromic and electrochemical properties. The thin film morphology has been considered as an efficient limiting aspect for its performance. In this work, we successfully prepared tungsten oxide thin films with distinctive nanostructures on conductive glass in a flame vapor deposition process. The morphology of tungsten oxide thin films could be controlled by adjusting various process variables, including methane-oxygen ratio, deposition height and support substrate temperature. 1-D nanowires and nanotubes could be obtained in fuel rich flame at high substrate support temperature and 3-D nanocolumns could be easily formed in fuel lean flame. This work offers a rapid, economic approach for the growth of tungsten oxide thin film with controlled morphology.
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