Abstract
The mechanism by which gold, silver and copper layers are formed by sputtering during the ion bombardment of targets of these metals has been investigated experimentally. Empirical evidence is given to show that, during the bombardment of metal foils with an appropriate thickness under certain conditions with argon ions, sputtering on both sides of the target occurs, namely forward and transmission sputtering. Transmission electron microscopy, scanning electron microscopy and transmission high energy electron diffraction were used to study the morphologies and structures of the layers obtained by both types of sputtering. Some possible applications of such layers are suggested.
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