Abstract
The morphology and optical properties of PMMA thin films deposited on silicon substrates were investigated. The spin coated films were characterized by atomic force microscopy and spectroscopic ellipsometry. Regardless that, the samples were deposited at different coating speeds, the surface structures of all PMMA thin films were consistent, and found to be relatively smooth, with a mean grain size in the range of 13-25 nm. The refractive index as well as the extinction coefficient of the films was determined using spectroscopic ellipsometry data over the wavelength range 380-750 nm. For this purpose, we used the Cauchy dispersion relation in order to represent PMMA layers, and then models were built by adding a roughness layer, which simply corrects any possible deviation from planarity. Besides, the thicknesses of all four films were calculated simultaneously based on multiple sample analysis method. By using this method, optical properties were coupled in such way that, the optical constants for all samples were assumed to be identical.
Highlights
Polymethylmethacrylate (PMMA) is considered as a member of a huge family of methacrylate esters
Like ordinary window glass, PMMA filters ultraviolet (UV) light at wavelengths below 300 nm (Acrylic Plastic Sheet 2002).These marvelous and unusual properties of PMMA make them as a good synthetic material for many applications such as optical communications, polymer optical fibers, optical waveguides, optical connectors, optical storage systems (Atef, Swoboda, & Zimmermann, 2010a,b; Guo et al, 2003) and optical switches with low driving power (Cao et al, 2012)
We aim to study the morphology of different PMMA thin films with different thicknesses deposited by spin coating on silicon substrates
Summary
Polymethylmethacrylate (PMMA) is considered as a member of a huge family of methacrylate esters. Its physical properties make it a promising candidate for many applications It is a light weighted material when compared to glass as their density is much less than that of glass (1.17–1.20 g/cm3) (Acrylic Plastic Sheet 2002). Like ordinary window glass, PMMA filters ultraviolet (UV) light at wavelengths below 300 nm (Acrylic Plastic Sheet 2002).These marvelous and unusual properties of PMMA make them as a good synthetic material for many applications such as optical communications, polymer optical fibers, optical waveguides, optical connectors, optical storage systems (Atef, Swoboda, & Zimmermann, 2010a,b; Guo et al, 2003) and optical switches with low driving power (Cao et al, 2012). Studying the optical properties of such material through methodological characterization merits further investigations
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