Abstract
V-shaped pits (V-defects) were observed in semipolar (112̄2)-oriented InGaN/GaN layers grown by plasma-assisted molecular beam epitaxy (PA-MBE). The pit morphology was that of inverted rhombic or trigonal pyramids aligned along the in-plane [11̄00] direction. Pit facet orientations were identified. The surface pits were found to be connected at their apex to mixed type a+ c threading dislocations with large screw components. Such dislocations exhibited [112̄0] average line directions with zig-zag 〈101̄0〉 local lines, and they also induced V-defects at the InGaN/GaN interface.
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