Abstract
We demonstrate the control of GaAs quantum dots morphology by using a thin AlGaAs capping layer. The AlGaAs layer uniformly covers the GaAs quantum dots and provides protections against thermally induced deformation up to 580 °C, which allows improved dot quality. In addition, annealing of AlGaAs-capped quantum dots at 640 °C flattens the top of the dots, leading to the formation of height-controlled quantum dots and their narrow inhomogeneous width of 28 meV.
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