Morphological Changes and Plume Deflection Effect during Pulsed Laser Ablation Deposition of Al

Abstract

The morphological changes and corresponding plume deflection effect during long laser (XeCl excimer laser, λ=308 nm, τ=30 ns) irradiation of Al target have been investigated,and results showed that, a the number of laser pulses per site increases, the target morphology changes and produces a visible deviation of the plasma plume up to 5º. Scanning electron spectroscopy analys of the target surface related the plume deflection angle to the target morphology and the number of laser pulses per site. Typically well-defined columnar structures oriented along the laser beam direction were observed on the target surface. The plume created during the laser ablation was clearly visible to the naked eye and was recorded by a digital camera. Detailed studies were also performed on the ablation rate at different laser fluences (4.6 J/cm2-12.5 J/cm2). The morphologies and the thickness of the Al thin films deposited on Si substrates during the present laser ablation experiments were also studied. Finally, the scenario explaining the formation of columnar structure on target surface responsible for the plume deflection effect will be discussed.