Abstract
Fresnel zone plates used for X-ray nanofocusing face high-aspect-ratio nanofabrication challenges in combining narrow transverse features (for high spatial resolution) along with extended optical modulation along the X-ray beam direction (to improve efficiency). The stacking of multiple Fresnel zone plates along the beam direction has already been shown to offer improved characteristics of resolution and efficiency when compared with thin single zone plates. Using multislice wave propagation simulation methods, here a number of new schemes for the stacking of multiple Fresnel zone plates are considered. These include consideration of optimal thickness and spacing in the axial direction, and methods to capture a fraction of the light otherwise diffracted into unwanted orders, and instead bring it into the desired first-order focus. The alignment tolerances for stacking multiple Fresnel zone plates are also considered.
Highlights
Fresnel zone plates are widely used as the nanofocusing optic in X-ray microscopes (Sakdinawat & Attwood, 2010; Attwood & Sakdinawat, 2017)
When multiple zone plates are located well within a depth of focus along the wavefield propagation direction, one can treat the net effect as being due to a zone plate with the combined thickness t as has been demonstrated (Shastri et al, 2001; Maser et al, 2002; Snigireva et al, 2007; Kagoshima et al, 2011; Feng et al, 2007; Aristov et al, 2007; Mohacsi et al, 2014, 2017; Rehbein et al, 2015)
We look in further detail at the optical properties of multiple stacked Fresnel zone plates
Summary
Fresnel zone plates are widely used as the nanofocusing optic in X-ray microscopes When multiple zone plates are located well within a depth of focus along the wavefield propagation direction, one can treat the net effect as being due to a zone plate with the combined thickness t as has been demonstrated (Shastri et al, 2001; Maser et al, 2002; Snigireva et al, 2007; Kagoshima et al, 2011; Feng et al, 2007; Aristov et al, 2007; Mohacsi et al, 2014, 2017; Rehbein et al, 2015) This close proximity is often challenging to achieve in practice, leading to an alternative approach of stacking multiple zone plates with separations larger than 2z provided each individual zone plate is designed to focus to a common location (Vila-Comamala et al, 2013; Gleber et al, 2014). In addition to the above, in the supporting information we consider alignment tolerances of stacked zone plates as already discussed in the references cited, but provide more detail on misalignment effects
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