Abstract
Using the simulation by the Monte-Carlo method, the distribution of carbon plasma particles over the energies of their arrival at the substrate in the deposition of diamond-like films by the are evaporation of graphite in vacuum has been investigated. The conditions of separation of fluxes according to the particle energies have been established and the optimum substrate potential for the production of films with a diamond-type lattice has been found. A high-quality separation of fluxes necessitates their preliminary acceleration with the aid of the additional anode with a −10 V potential, placed between the cathode and the separator. The optimum substrate potential is at −18 V with a permissible drift±3V.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
