Abstract
A Monte Carlo simulation technique is used to investigate slow electrons penetration in semi-infinite aluminium and gold in the energy range of 500–4000 eV. Elastic scattering is based on a modified Rutherford differential cross section where the numerical coefficient in the atomic screening parameter is taken to be variable. To model inelastic core and valence electron excitation, we have used the Gryzinski's expression. Our simulated results are compared with the experimental backscattering data and good agreement is observed which suggests that both the transport model and the scattering cross sections used in the present work are reliable.
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