Abstract
AbstractThe structure of radio‐frequency (rf) discharges in N2 is examined for the electrons and positive ions, in which electron–neutral collisions and ion–neutral collisions are taken into consideration. Some detailed properties of rf plasmas sustained by an rf source voltage of 13.56 MHz and an amplitude of 200 V are presented using Monte Carlo simulation in electropositive gas (N2). It is shown that most of the rf external electric field is absorbed in the sheath regions, whereas electrons respond easily to the oscillating rf electric field, ions cannot oscillate with the rf electric field. The oscillations of the electron cloud determine the instantaneous sheath thickness near each electrode. The mean energy and the density of charged particles are also discussed. Copyright © 2010 John Wiley & Sons, Ltd.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: International Journal of Numerical Modelling: Electronic Networks, Devices and Fields
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
