Abstract
In order to evaluate the efficiency of pulse heating a field emission specimen by an electron beam, it is necessary to know the total amount of energy deposited as a function of incident electron energy. The total energy deposited, however, also depends on the geometry of the specimen which in the case of FIM is approximately a parabola of revolution. Monte Carlo simulations were performed to model this interaction and to determine, principally, the amount of energy deposited into the sample per incident beam electron. By determining this information for incident beam locations along the specimen axis, it is possible to evaluate the effectiveness of specimen heating by high energy electrons. A detailed mapping of energy loss for variations in incident electron energy and beam position was determined.
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