Abstract
Oxygen plasmas have found numerous applications in plasma processing, such as reactive sputtering, dry etching of polymers, oxidation, and resist removal of semiconductors. Swarm and transport coefficients are essential for better understanding and modelling of these gas discharge processes. The electron swarms in a gas under the influence of an electric field can be simulated with the help of a Monte Carlo method. The swarm parameters evaluated are compared with experimental results.
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