Abstract

A Monte Carlo (MC) simulation approach is developed to describe the proton-induced secondary electron emission in solids. First, we calculate the double differential cross-section (DDCS) of excited electrons for different charge fractions of the projectile resulting from electron screening. The DDCS parameter is used in MC calculations to describe electron transport in the medium. This parameter is calculated for electrons excited in the 1 eV − 100 eV energy range. The theoretical electron transport modeling is based on Mott’s elastic scattering cross-section and Lindhard’s dielectric function for inelastic scattering. The results obtained for aluminum describe the angular and energy distributions of backscattered electrons for incident protons with energy below 25 keV at normal incidence. Additionally, the total electron emission yield is also calculated, showing a good agreement with available measurements. Our predictions for energy and angular distributions could not be compared with experimental results due to a lack of data.

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