Abstract
A new Monte Carlo code for the detailed simulation of the transport of low-energy electrons and positrons in solids is presented, including a critical discussion of concepts and approximations in the scattering model. Inelastic scattering is calculated using a Bethe surface model based on optical and photoelectric data for the solid, making possible a good accuracy at low energies, and a high resolution (∼1 eV) in simulated energy loss spectra. Exchange corrections for electrons and relativistic corrections for energies up to ∼100 keV are included. Elastic scattering is calculated by means of a differential cross section obtained by relativistic partial wave analysis for an exchange corrected muffin-tin Dirac-Hartree-Slater atomic potential. In the simulation, no adjustments of parameters to empirical scattering data are made. For comparison, measurements have been made of the characteristic low energy loss spectrum of 100 keV electrons through a thin silicon film. Simulated results for electrons and positrons are also compared with other available experimental data, in particular at low (a few keV) energies. In general, very good agreement is obtained.
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