Abstract

The preliminary results of the Monte Carlo analysis of the 3−gauge (or conductance tube) test dome reported at the 6th International Vacuum Congress1 have been extended to the noncosine distribution for molecules reflected back into the test dome from a pump being tested. The gauge locations for the measurement of ’’intrinsic pumping speed’’ are presented showing the influence of reflection coefficient on optimum gauge location. The distribution from one actual pump configuration has been obtained from the Monte Carlo calculations and applied to the test dome design. The pumping speed obtained from this design for a 3−gauge test dome is compared with the results obtained with a Fischer−Mommsen test dome.

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