Abstract
Monostable vibration can eliminate dynamic bifurcation and improve system stability, which is required in many microelectromechanical systems (MEMS) applications, such as microbeam-based and comb-driven resonators. This article aims to theoretically investigate the monostable vibration in size-effected MEMS via a low dimensional model. An improved single degree of freedom model to describe electrically actuated microbeam-based resonators is obtained by using modified couple stress theory and Nonlinear Galerkin method. Static displacement, pull-in voltage, resonant frequency and especially the monostable dynamic behaviors of the resonators are investigated in detail. Through perturbation analysis, an approximate average equation is derived by the application of the method of Multiple Scales. Theoretical expressions about parameter space and maximum amplitude of monostable vibration are then deduced. Results show that this improved model can describe the static behavior more accurately than that of single degree of freedom model via traditional Galerkin Method. This desired monostable large amplitude vibration is significantly affected by the ratio of the gap width to mircobeam thickness. The optimization design results show that reasonable decrease of this ratio can be beneficial to monostable vibration. All these analytical results are verified by numerical results via Differential Quadrature method, which show excellent agreement with each other. This analysis has the potential of improving dynamic performance in MEMS.
Highlights
Microbeam-based structures are widely applied in microelectromechanical systems (MEMS), such as microactuator/sensor [1,2,3], energy harvester [4], microresonator [5,6,7], gyroscope [8], microgripper [9,10] and so on
Some microsensors and actuators are adopted for various biomedical applications. The operation of these electrostatically actuated resonant devices is based on linear resonance [11]. These dynamic systems are nonlinear and the output energy is very small in the case of linear resonance, which is undesirable in MEMS
This paper aims to obtain an improved single degree of freedom model by using modified couple stress theory and Nonlinear Galerkin method and deduce theoretical expressions about parameter space and maximum amplitude of monostable vibration
Summary
Microbeam-based structures are widely applied in MEMS, such as microactuator/sensor [1,2,3], energy harvester [4], microresonator [5,6,7], gyroscope [8], microgripper [9,10] and so on. Their light weight, small size, low-energy consumption and durability make them even more attractive. Monostable large amplitude vibration is required in MEMS sensing application It can eliminate dynamic bifurcation phenomenon and improve system stability
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
