Abstract
The complete mathematical modeling and design verification of a novel monolithically integrated tri-axes MEMS capacitive accelerometer is presented in this paper. The designed accelerometer is a single structure having three individual single axis accelerometers, integrated on a single substrate uniformly centered on single axis with chip size of 3.2 mm × 3.5 mm. We have used standard commercially available surface micromachining technology MetalMUMPs available from MEMSCAP Inc. The designed accelerometer is optimized by analytical technique using Matlab. The physical level simulation is done in the Analyzer module of CoventorWare to verify the structural model of designed accelerometer. It is concluded that the results obtained from the physical level simulation are in good agreement with the analytically calculated results. The design has been successfully verified using the Finite Element Analysis.
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