Abstract
A monolithic thin film red light emitting diode (LED) active-matrix (AM) micro-display driven by a complementary metal-oxide semiconductor (CMOS) driver is demonstrated. The resolution of the micro-display is 64×36, with a 40 μm ×40 μm pixel pitch. Starting from AlGaInP epi-layers grown on GaAs substrates, the monolithic red LED array was fabricated and then integrated with the AM driver using Au/In flip-chip bonding technology. After removal of the GaAs substrate, a crack-free thin film micro-display was realized with a high pixel yield. The thin film red LED AM micro-display delivers a luminance of 2.35×10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</sup> cd/m <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> at full-load conditions and can render images with 4-bit grayscale. This work not only provides a manufacturing-friendly approach for monolithic thin film red LED micro-displays, but also brings the possibility of hybrid integration with blue/green LEDs to achieve full-color LED micro-displays.
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