Monolithic Silicon-On-Nothing Fiber-Based Pressure Sensors

Abstract

Monolithic-silicon fiber-based pressure sensors offer high resolution over a broad frequency range with minimal footprint. We fabricate these devices using scalable single frontside mask silicon nanofabrication. Our sensors consist of a sealed 1 μm cavity under a 1 μm thick silicon diaphragm only 100 μm in diameter. For static pressures from 0.3 to 1.4 atm, our sensors showed a standard deviation of 2.6×10−3 atm from the reference. For dynamics pressures out to 50 kHz, our sensors show a pressure resolution of 1.1×10−6 atm/√Hz.