Monolithic Red/Green/Blue Micro-LEDs With HBR and DBR Structures

Abstract

In this letter, monolithic red, green, and blue (RGB) micro light-emitting diodes (LEDs) were fabricated using gallium nitride based blue micro LEDs and quantum dots (QDs). Red and green QDs were sprayed onto individual region surrounded by patterned black matrix photoresist on the blue micro LEDs to form color conversion layers. Owing to its light-blocking capability, the patterned black matrix photoresist improved the contrast ratio of the micro LEDs from 11 to 22. To enhance the color conversion efficiency and the light output intensity, a hybrid Bragg reflector (HBR) was deposited on the bottom side of the monolithic RGB micro LEDs, thus reflecting the RGB light emitted to the substrate. To further improve the color purity of the red and green light, a distributed Bragg reflector (DBR) with high reflection for the blue light was deposited on the top side of the QDs/micro LEDs. The red and green light output intensities of the micro LEDs with HBR and DBR were enhanced by about 27%.