Abstract

The multiple functionalities of III-nitride semiconductors enable the integration with different components into a multicomponent system with enhanced functions. Here, we propose to fabricate and characterize a monolithic InGaN photonic circuit of a transmitter, waveguide, and receiver on an III-nitride-on-silicon platform. Both the transmitter and the receiver, sharing identical InGaN/GaN multiple-quantum-well structures and fabrication procedures, work to emit light and detect light independently. The 8μm wide and 200μm long InGaN waveguide couples the modulated light from the transmitter and sends the guided light to the receiver, leading to the formation of an in-plane light transmission system. The induced photocurrent at the receiver is highly sensitive to the light output of the transmitter. Multi-dimensional light transmissions are experimentally demonstrated at 200Mb/s. These multifunctional photonic circuits open feasible approaches to the development of III-nitride multicomponent systems with integrated functions for comprehensive applications in the visible region.

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