Abstract
Monolithic bimorphs with internal electrodes which are composed of two, three and four layers were made from the high d31 material of a modified Pb(Ti, Zr)O3. The new bimorphs utilized unstiffened mode and were used as large-displacement transducers under low DC bias. Those bimorphs with four layers generate displacement of up to 0.6 mm at a voltage of 30 V with 4 msec response. The force induced by the DC bias was in proportion to the bias. Hysteresis of the displacement became smaller by introducing an intermediate layer or internal Pd electrodes.
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